1 Key Laboratory of Time and Frequency Primary Standards, National Time Service Center, Chinese Academy of Sciences, Xi’an 710600, China
2 School of Astronomy and Space Science, University of Chinese Academy of Sciences, Beijing 100049, China
3 State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
4 School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
5 The 29th Research Institute of China Electronics Technology Group Corporation, Chengdu 610029, China
6 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100190, China
7 e-mail: ml@semi.ac.cn
8 e-mail: szhang@ntsc.ac.cn